Abstract
Undoped and Mn-Mg co-doped barium strontiun titanate (Ba0.25Sr0.75TiO3) thin films were deposited on Pt/Ti/SiO2/Si substrates by a sol-gel technique. X-ray diffraction (XRD) analysis and FE-SEM reveal that the films exhibite a pure perovskite phase structure, uniform grain sizes and crack-fee. The dielectric constant, loss, tunability and leakage current density are 200, 0.010, 38%, 1×10-5A/cm2, respectively, at a 1mol% Mn-Mg content. The improved BST thin films can be used for tunable microwave devices.
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