Abstract
In this article, we study the effect of various geometrical patterns (meander, spiral, and fin shape) of composite MoSi2-SnO2 microheater films towards an energy-saving approach for hydrogen gas sensing. The MoSi2-SnO2 microheater was prepared by using the screen-printing technique on a Si wafer. The structural and microstructural evolution characterization was done by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, and field emission scanning electron microscopy (FESEM). The electrical characteristics were assessed by I-V measurements up to 8 V. The Joule heating effect was studied for printed patterns and correlated with the maximum temperature obtained in each case. We have compared the gas sensing properties of the composite MoSi2-SnO2 thin films according to the various geometrical patterns for hydrogen gas. The results show that the fin-shaped microheater provides more heating temperature (120 °C) followed by spiral and meander patterns due to a higher resistance change. The fin-shaped microheater pattern showed maximum temperature when operated at the same power levels from 0 to 20 mW. The fin-shaped structure microheater sensor was highly selective and had the optimum response and recovery times of 12 s and 27 s with a detection limit of 0.25 ppm. Based on these observations, the hydrogen sensing mechanism of MoSi2-SnO2 microheaters is discussed and reported here.
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