Abstract
We have experimentally investigated the influence of the reactive ion etching (RIE) on the superconducting properties of exfoliated thin films of layered superconductor NbSe2 through transport measurement. Wires with width of 2 μm and 0.5 μm were fabricated from a single NbSe2 film (thickness ∼ 65 nm) using RIE with CF4 and O2 gas mixture. While the 2-μm wires did not exhibit any distinguishable degradation in residual resistivity, residual resistance ratio, superconducting transition and current-voltage characteristics in the superconducting state, significant degradation was observed in the 0.5-μm wires.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
