Abstract
In this work the mixture of hydrogen and a small amount (0–1.5 %) of methane was studied. The measurements were carried out in a low-pressure (5 Pa) capacitively coupled radio frequency (RF) discharge. Positive ions and neutral particles were detected by Plasma Process Monitor PPM 421 (Balzers). Optical emission spectra of active discharge were measured by spectrometer Triax 550 Jobin-Yvon Spex.
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