Abstract
In this paper the influence of material composition on the structural, surface and optical properties of HfO2-TiO2 mixed oxide coatings was investigated and discussed. Five sets of thin films were deposited using reactive magnetron sputtering: HfO2, TiO2 and three sets of mixed HfO2-TiO2 coatings with various titanium content. The change in the material composition had a significant influence on the structural, surface and optical properties. All of the deposited coatings, except for (Hf0.55Ti0.45)Ox, were nanocrystalline with crystallites ranging from 6.7 nm to 10.8 nm in size. Scanning electron microscopy measurements revealed that surface of nanocrystalline thin films consisted of grains with different shapes and sizes. Based on optical transmission measurements, it was shown that thin films with higher titanium content were characterized by a higher cut-off wavelength, refractive index and lower optical band gap energy. The porosity and packing density were also determined.
Highlights
Thin oxide films with precisely defined properties are a strong requirement for the development of modern technologies
Transparent thin films based on titanium dioxide (TiO2 ) and hafnium dioxide (HfO2 ) are widely used in industrial applications such as optical and protective coatings or optoelectronic devices
HfO2 and TiO2 are characterized by many advantages, e.g., very good thermal, chemical, and mechanical stability and high transparency [1,2,3,4,5]
Summary
Thin oxide films with precisely defined properties are a strong requirement for the development of modern technologies. Transparent thin films based on titanium dioxide (TiO2 ) and hafnium dioxide (HfO2 ) are widely used in industrial applications such as optical and protective coatings or optoelectronic devices. Titanium dioxide thin films with a rutile phase exhibit high refractive index and good thermal stability [21,22]. These thin films can exhibit high hardness and very good optical parameters, e.g., a low extinction coefficient [1]. Due to these qualities, mixed HfO2 -TiO2 thin films can be used as functional optical coatings. The influence of composition of mixed hafnium-titanium thin films deposited by reactive magnetron sputtering on their structural, surface and optical properties have been described
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
