Influence of magnets’ phyllotactic arrangement in cluster magnetorheological effect finishing process

Abstract

The application of bionic research results to practical engineering can have some unexpected consequences. In this research, a cluster magnetorheological effect finishing method based on phyllotactic pattern that combines the arrangement of sunflower seeds on a plate, and the magnetic arrangement of magnetorheological finishing is proposed. By studying the combination of phyllotactic angle, magnetic pole direction and process parameters, such as the speed ratio and the eccentricity, several types of magnet arrangements that can obtain higher polishing efficiency and better wafer flatness are proposed. A method for the evaluation of the influence of the arrangement on the polishing effect is also proposed. Furthermore, a method for solving the interaction problem of the magnetic field generated from multiple magnets is discussed.