Influence of Low‐Temperature Co‐Fired Ceramics Green Tape Characteristics on Shrinkage Behavior

Abstract

To establish a better understanding of the complex densification and shrinkage processes of low‐temperature co‐fired ceramics (LTCC) and to improve the dimensional control in the manufacture of LTCC multilayer devices, the influence of glass, composite, and microstructural green tape characteristics on the densification and shrinkage behavior of LTCC materials, with special focus on the development of anisotropy, was investigated. To study the influence of these factors, a commercial LTCC system was analyzed regarding chemical and microstructural composition as well as sintering behavior. The results of the analysis showed that the commercial LTCC system is composed of alumina as a ceramic filler and a CaO–SiO2–B2O3–Al2O3 glass. Based on these results, a similar glass was produced. To understand the mechanisms of densification, its wetting behavior and viscosity as a function of temperature were investigated. As developed glass was mixed with an alumina powder and milled down to average grain sizes of 1, 2, and 3 μm, respectively. From these composite powders, slurries were prepared and tape cast. The sintering kinetics including onset temperature, development of viscous flow as well as phase development of both commercial and internally developed LTCC tapes LTCC tapes in relation to their modified composition and green tape structures were analyzed in situ by means of optical dilatometry, thermo‐mechanical analysis (TMA), and high‐temperature‐X‐ray diffraction. The viscous behavior of the glass‐filler composites was determined by means of cyclic dilatometry in a TMA device.