Abstract
The influence of the incidence angle and polarization state on the damage site characteristics of fused silica under 355nm laser irradiation was investigated. The initial damage morphologies and growth behaviors of the damage sites on the exit surface at incidence angles of 0° and 45° as well as in P and S states were compared to investigate the effects of various angles and polarization states. The relationships between the size of the initial damage sites and the laser fluence, as well as the growth threshold, were discussed. The damage morphologies of the craters and cracks at different incidence angles and polarization states were then investigated. Finally, the growth characteristics of the lateral size, crater depth, and crack depth were compared and analyzed.
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