Abstract
The chemical composition and structure of titanium oxide films deposited on Low Temperature Isotropic Carbon (LTI-carbon) by ion beam enhanced deposition (IBED) is jointly controlled by the process parameters of IBED. In this paper, the influence of O 2 pressure, substrate temperature and ion beam energy on the composition and structure of the prepared titanium oxide films was studied by means of X-ray Photo-Electron Spectroscopy (XPS), Rutherford Backscattering Spectroscopy (RBS), X-ray Diffraction (XRD) and Glancing Angle X-ray Diffraction (GAXRD). The results show that the prepared films are polycrystalline with TiO, Ti 2O 3 and TiO 2 as coexisting phases. The influence of O 2 pressure is mainly on the composition of the film. Ion beam energy has a great influence on the structure of the film. Neither the composition nor the structure of the film is sensitive to substrate temperature that ranged from room temperature to 300°C.
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