Abstract

To control the emission of halides into the environment, an experiment on the nonthermal plasma decomposition of the halides CF4, CHF3, C2HCl3, and CHClF2 was conducted in a wire-in-tube corona reactor. It was found that the decomposition of C2HCl3 and CHClF2 was easy compared with the decomposition of CF4 and CHF3. With the addition of H2 in N2 gas, the decomposition ratio of CF4, C2HCl3, and CHClF2 increased. In contrast, the decomposition ratio of CHF3 in a hydrogen-rich atmosphere was lower than that in an N2 atmosphere. It was demonstrated that the yields of HF and/or HCl formed during halide decomposition clearly increased in the presence of H2 in N2 gas. Furthermore, in order to prevent the production of unwanted products from halide decomposition, a combination of plasma decomposition and in situ alkaline absorption was devised by coating a layer of Ca(OH)2 onto the surface of the grounding electrode. It was demonstrated that the Ca(OH)2 sorbent played an effective role as a scavenger, participating in halide decomposition by capturing reaction products such as HCl and HF, therefore resulting in increased halide decomposition.

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