Abstract
A gridded Pt/SiO2/Si MOS sensor for hydrogen detection has been fabricated on p-type ⟨100⟩ Si wafer having resistivity (1–6 Ω cm). The SiO2 and Platinum (Pt) gate thickness were kept about 10 nm and 35 nm. The performance of Pt gate MOS sensor was evaluated through C-V characteristics (capacitance vs voltage) upon exposure to H2 (250 ppm–4000ppm) at different frequencies (25 kHz and 50 kHz) in a closed chamber at air ambient atmosphere. The capacitance of the sensor decreases with increase in frequency as well as H2 gas concentration. The flat band voltage characteristics have been evaluated at different frequencies and concentrations. It decreases as the frequency and concentration of gas both increases. The maximum flat band voltage change was observed −0.6 V at 25 kHz. The sensor exhibits better sensitivity (∼88%) at low frequency (25 kHz). The high response of sensor is attributed to the side wall diffusion, increase in surface area caused by inner side wall and increase in porosity, increase in fixed surface state density, spill-over mechanism and change in interface state density on exposure of gas along with the formation of dipole layer.
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