Abstract
ZnO submicron particles were grown on Au-catalyzed Si substrates using a vapor phase transport (VPT) growth process under different mixture gas ratios at a growth temperature of 900°C. The structural and optical properties of the ZnO submicron particles were investigated using field-emission scanning electron microscopy (FE-SEM), x-ray diffraction (XRD), and photoluminescence (PL). The ZnO submicron particles were clustered for the O2/Ar mixture gas ratios (%) higher than 10%, which was largely determined by the ambient gas. In particular, for an O2/Ar mixture gas ratios of 30%, ZnO submicron particles with diameters between 125–500 nm were observed; in addition, the narrowest XRD full width at half maximum (FWHM) values and PL spectra with 0.121° and 92 meV were reported. The structural and optical properties of the ZnO submicron particles improved as the O2/Ar mixture gas ratio was increased, as observed from the XRD and PL spectra results.
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