Influence of Forced Diffusion of Boron on Electrical Conductivity of Diamond Films

Abstract

AbstractFour CVD diamond films grown on tungsten carbide were used for diffusion. Diffusion was performed in a hydrogen atmosphere. Three methods of diffusion were used: conventional diffusion due to concentration gradient, forced diffusion under a dc electric bias with thermal ionization and forced diffusion with optical and thermal ionization of boron acceptor level in diamond. The temperature dependence of the electrical conductivity of the diffused samples was measured in the temperature range 300–600 K. The increase of approximately six order of magnitude in conductivity of the films doped by forced diffusion was obtained. The samples diffused with boron by conventional diffusion due to concentration gradient showed only one order of magnitude increase in electrical conductivity.