Abstract
AbstractThe thermal conductivity of aluminum nitride is significantly affected by its purity. We used CaCO3 as an additive to decrease the oxygen content. Calcium-aluminate is formed by the reaction of the aluminum nitride powder oxide layers and CaO during firing. We investigated the influence of firing gas pressure on the microstructure and thermal conductivity of aluminum nitride. The thermal conductivity reached 270 W/m°K when 4 wt% CaO was added and firing gas pressure was 700 kPa. Under these conditions, the amount of remaining oxygen was at its minimum and the grain size of the aluminum nitride was at its maximum.
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