Influence of electron-electron collisions on electron energy distributions and transport in inductively coupled plasmas

Abstract

Summary form only given, as follows. The trend towards using high-plasma density low gas pressure sources in materials processing has resulted in renewed interest in electron transport in inductively coupled plasma (ICP) discharges. Although the partial ionization in these devices can be large the electron energy distribution (EED) is generally nonMaxwellian as a result of the power being deposited in a nonuniform and non-linear fashion. As a consequence, a kinetic approach is required to properly resolve electron energy transport. In this paper we report on a computational investigation of the influence of electron-electron collisions on EEDs and electron transport in ICPs. New algorithms for electron-electron collisions have been developed and implemented into the Electron Monte Carlo Simulation of the two-dimensional Hybrid Plasma Equipment model which iterates through modules to obtain a converged solution.