Influence of electron temperature anisotropy on wave mode propagation and power deposition characteristics in helicon plasma

Abstract

As the core issue in helicon discharge, the physical mechanism behind the high ionization rate phenomenon is still not fully understood. Based on the warm plasma dielectric tensor model which contains both the particle drift velocity and temperature anisotropy effect, by employing the general dispersion relation of electromagnetic waves propagating in magnetized and uniform plasma with typical helicon discharge parameter conditions, wave mode propagation characteristic and collisional, cyclotron and Landua damping induced wave power deposition properties of azimuthally symmetric mode are theoretically investigated. Systematic analysis shows the following findings. 1) Under typical helicon plasma parameter conditions, i.e. wave frequency <i>ω</i>/(2π)=13.56 MHz, ion temperature is one tenth of the electron temperature, and for a given magnetic field <i>B</i><sub>0</sub> (or wave frequency <i>ω</i>), there exists a critical wave frequency <i>ω</i><sub>cr</sub> (or magnetic field <i>B</i><sub>0,cr</sub>), above which (or below <i>B</i><sub>0,cr</sub>) the damping of the <i>n = </i>1, 2, 3 cyclotron harmonics begins to increase sharply. 2) For the electron temperature isotropic case, the attenuation constants of different harmonics start to increase significantly and monotonically at different thresholds of magnetic field, while the phase constant abruptly increases monotonically from the beginning of the parameter interval. On the other hand, for the electron temperature anisotropic case, both the phase constant and attenuation constant have peaking phenomenon, i.e. the attenuation constant begins to increase sharply at a certain value of <i>B</i><sub>0</sub> and meanwhile the phase constant presents a maximum value near the same value of magnetic field, thus the phase constant starts to keep constant at a certain value of <i>B</i><sub><i>0</i></sub> and meanwhile the attenuation constant has a maximum value near this same value of magnetic field. 3) For the wave power deposition properties, under electron temperature anisotropy conditions, power deposition due to collisional damping of Trivelpiece-Gould (TG) wave plays a dominant role in a low field (<i>B</i><sub>0 </sub>= 48 Gs) (1 Gs = 10<sup>–4</sup> T); by considering the electron finite Larmor radius (FLR) effect, the power deposition of TG wave presents a maximum value at a certain point of parallel electron temperature<i> T</i><sub>e,</sub><sub>//</sub>; with the decrease of <i>T</i><sub>e,⊥</sub>/<i>T</i><sub>e,</sub><sub>//</sub>, the maximum value of power deposition increases gradually. All these findings are very important in further revealing the physical mechanism behind the high ionization rate in helicon plasma.