Abstract
Influence of electron irradiation on structural changes in the process of microindentation by the Vickers method in (111) oriented n-Si has been studied. It is shown, that electron irradiation with 1.1013 cm-2 fluence causes weak increase of elastic modulus and average contact pressure causing plastic deformation. In the area of unloading of the functional dependences of the indenter load-displacement, a plateau and a gradual change in the slope are simultaneously revealed. The mentioned changes are characteristic of partial amorphization and structural transformations in the metastable phases of silicon. Electron irradiation reveales a tendency to increase the critical pressures of phase transformations in the range of 4-5.5 GPa of average contact pressure.
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