Abstract

We investigated the adsorption of Li on the Si(100) surfaces of n- and p-type doped samples. ΔΦ and TDS measurements show the well known features for adsorption on the n-type sample, but unusual behaviour on the p-type one. A closer inspection clearly indicates strong bulk diffusion into the p-type sample. The dependence of the diffusion rate on the doping can be retraced to the solubility of Li in silicon which strongly depends on the acceptor concentration.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call