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Abstract
Results are presented of investigations to study how desorption caused by interaction between the surface of condensation and the plasma particles affects the composition of thin films of Y-Ba-Cu-O high-temperature superconductors during magnetron sputtering. An analysis of the current-voltage characteristics of Langmuir probes was used to determine the floating potential of the substrate at various working gas pressures. Electron Auger spectroscopy was used to determine the atomic composition of films obtained at various substrate bias voltages. It was established that during magnetron sputtering of Y-Ba-Cu-O films the formation of the condensate composition may be strongly influenced by selective desorption of components from the substrate and the surrounding structural elements as a result of bombardment by plasma ions accelerated in the floating potential field.
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