Influence of deposition temperature and time on structural and gas sensing properties of electrochemically deposited ZrO2 layers

Abstract

This research is focused on the influence of deposition temperature and time on structural and gas sensing properties of electrochemically deposited ZrO2 layers. ZrO2 layers were deposited on gold electrodes of quartz resonators by electrochemical process using a three-electrode electrochemical system. The deposition was carried out in an aqueous solution containing ZrOCl2 (5 mM) and KCl (0.1 M). The surface morphology, structure and average roughness of the layers were determined by Scanning Electron Microscopy (SEM) and 3D optical profilometry. Studies demonstrated that deposition temperature strongly influences the surface morphology of the films, especially at higher temperatures whereas weaker dependence on deposition time was observed. The layers sensitivity to volatile organic compound (VOC) vapors was determined by the quartz crystal microbalance method (QCM) method. The measurements of sensitivity were performed in an airtight box at different concentrations.