Abstract
The growth peculiarity of Sc thin film is simulated by a three-dimensional kinetic Monte Carlo method. The simulation results show that the surface root-mean-square roughness of Sc thin films is increased with the increasing of the deposition rate. The number of initial nucleus of Sc thin films is decreased gradually with the increasing of deposition temperature, and the size of the Sc grains gets larger with the increasing of the deposition temperature. The optimal deposition rate and deposition temperature of Sc thin film are predicted to be 10 ML/s or 3.308 nm/s, and 700 K, respectively.
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