Abstract
Wear life of molybdenum disulfide films sputtered on rollers has been evaluated using a newly developed testing device. The wear track was investigated by FE-SEM and EPMA. It has been found that the relationship between the wear life and film thickness depends on the crystalline orientation of sputtered molybdenum disulfide. When the C axis of molybdenum disulfide crystal is fast oriented perpendicular or oblique direction to the substrate surface, the wear life is scarcely influenced by the film thickness since the crystal fragments fracture readily. When the C axis is weakly oriented perpendicular or oblique direction to the substrate surface, the wear life increases with the film thickness.
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