Abstract
Pb ( Zr x Ti 1 − x ) O 3 [x=0.52, PZT(52) near morphotropic phase boundary], tetragonal PZT(65), and rhombohedral PZT(20) thin films have been fabricated on different transparent substrates by radio frequency sputtering. The optical studies show that the band gap energies and refractive indices of the PZT thin films are crystal phase dependent. The largest electro-optic (EO) coefficient of 219.6 pm/V has been achieved by controlling the crystal phase of the PZT thin films. The linear EO coefficients of PZT(52) films on the (Pb0.86La0.14)TiO3-coated glass, indium tin oxides, and MgO substrates are also studied. Such study could contribute to the crystal phase and substrate dependent PZT films for electro-optic devices and multifunctional integrated circuits.
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