Abstract
ZrCN thin films with different C contents were deposited by reactive unbalanced magnetron sputtering.Their chemical composition,microstructure,surface morphology,mechanical and tribological properties were investigated by XPS,XRD,SEM,AFM,nanoindentation and tribometer. The results indicated that the atomic ratios of(C+N)/Zr played an important role in phase configuration, microstructure,mechanical and tribological properties.When the ratio was less than 1,a Zr(C, N) solid solution was formed due to the dissolution of C into the ZrN lattice.When the ratio was larger than 1,the amorphous phase CN and C appeared and the ZrCN thin films had a fcc crystal structure. As the C contents increased,the diffraction peak decreased and widen,and the hardness of ZrCN thin films increased first and then decreased.As the C contents increased,the coefficient of friction of ZrCN thin films decreased and the wear scar became more shallower and narrower.The incorporation of C changed the wear mode and improved the friction and wear behaviors.The hardness of ZrCN film reached 31 GPa and friction coefficient was 0.26 when C content was 13.2%.
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