Abstract
To realize the practical use of reactively bonded solder joints for thermally sensitive devices such as MEMS and electrical modules, we quantitatively measure the thermal resistance of solder joints fabricated by Al/Ni self-propagating exothermic reaction. By the laser flash method with response function analysis, the influence of bonding pressure on the thermal resistance of the reactive joints is investigated. The thermal resistance of the joints obtained by 3 MPa bonding is higher than that by 20 MPa bonding. By cross-sectional scanning electron microscopy (SEM) observation, many voids are found in the vicinity of the interface between the reacted AlNi and bottom-side solder layers in 3 MPa joints. In 20 MPa joints, a Ni-rich AlNi intermetallic compound instead of voids is produced around the interface. For reducing the thermal resistance of the reactive joints, the void generation mechanism is discussed in light of SEM observation and electron probe microanalysis (EPMA) analysis results.
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