Abstract
The films of the Ti-Nb-C system were deposited by direct current (DC) magnetron co-sputtering of composite Ti&#43;Nb, and graphite targets onto Si substrates to which negative substrate bias in the range of -50&#247;-200 V was applied during film deposition. The microstructure, chemical bonds, and mechanical properties of films were comparatively investigated. The X-ray diffraction (XRD) analysis revealed that the peaks of the XRD spectra of the film obtained by co-spattering of the composite Ti&#43;Nb and graphite targets are located in the intermediate region between the corresponding peaks of the Ti-C and Nb-C films. The X-ray photoelectron spectroscopy (XPS) showed that the Ti-C and Nb-C bonds prevail in the deposited Ti-Nb-C films. It was suggested that the Ti-Nb-C films are nanocomposite and consist of the crystallites of Ti<sub>1-x</sub>Nb<sub>x</sub>C<sub>y</sub> solid solutions surrounded by amorphous carbon-based matrix. The Knoop hardness of the Ti-Nb-C film is highest (37.5 GPa) in the film deposited at -50 V substrate bias. The average friction coefficient determined before film delamination was the lowest (0.12) in that Ti-Nb-C film.
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