Abstract
This paper investigates the effect of polarization directions on underwater femtosecond laser machining of silicon wafer. Firstly, laser ablation in liquids produces laser-induced periodic surface structures (LIPSS) on both edges of the groove. The direction of LIPSS has direct correlation with the polarization of the laser beam. Secondly, the electric field intensity distribution within the groove is analyzed by numerical simulation employing the finite-difference-time-domain (FDTD) method. The simulation and experimental results reveal that the distribution of the inter electric field intensity within the grooves varies with polarization direction. As the angle between the polarization and scanning directions decreases, the peak electric field strength and groove depth gradually increase. Finally, changing the direction of polarization of the beam affects the symmetry of the groove profile. The groove profile produced by ablation is symmetrical when the beam polarization direction is parallel to the scanning direction. By modulating and optimizing the direction of polarization, grooves with large depth and symmetrical shape can be obtained.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
