Abstract
Secondary electron images obtained by fast beam scanning were degraded by a microbeam current fluctuation of more than 1% in the millisecond range, giving rise to difficulties in minimizing the beam spot. Multiple iteration of mapping improved the image, while an increase in the time-constant for the secondary electron signal processing, which smoothed the signal fluctuation induced by ion beams, could not improve the image. Rutherford backscattering images were less sensitive to the beam fluctuation and were not greatly degraded by a beam fluctuation of up to 50%.
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