Abstract
ZrN/WN multilayered coatings with nanoscale bilayer periods have been synthesized with different Ar/N 2 flow ratio in an ultra-high vacuum rf magnetron sputtering system. The extensive measurements were employed to investigate the influence of Ar/N 2 flow ratio on microstructure and mechanical properties of the coatings. A well-defined composition modulation and layer structure of the multilayered coatings were proved. Almost all multilayered coatings revealed higher nanohardness than the rule-of-mixture values of the monolithic ZrN and WN coatings. At Ar/N 2 flow ratio (F Ar:F N2 = 5), the X-ray diffraction (XRD) pattern showed strong intensity of W 2N (111), W 2N (200) and W 2N (311). The multilayered coating at this condition possessed excellent hardness, residual stress, reduced elastic modulus and fracture resistance, compared to those synthesized at other Ar/N 2 flow ratios.
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