Abstract
The N-doped TiO2films were prepared by cathode vacuum arc deposition with ion beam assisted. Influence of annealing temperature on the microstructure, optical property, photocatalytic activity and antibacterial activities of the N-doped TiO2films was studied. The experimental results indicate that annealing treatment significantly affects both microstructure and photoactivity. All the as deposited N-doped TiO2films retained an amorphous structure, the crystalline structure of N-doped TiO2films annealed in the range 400°C- 600°C were examined to be of anatase structure with a (101) preferential orientation，photocatalytic activity of the N-doped TiO2film annealed at 500°C was best under visible light, The N-doped TiO2films against E. coli and S. aureus had more than 99% antibacterial rate, and the antibacterial activity of the N-doped TiO2films stronger slightly with the increase of the annealing temperature.
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