Abstract
We have investigated the influence of an inhomogeneous shallow charge distribution on the results of deep level transient spectroscopy (DLTS) by numerical simulation of capacitance transients. Our results show that the correct deep trap concentration results if the shallow impurity concentration at the end of the space charge region enters into the formula for the trap concentration. A shift of the DLTS peak to higher temperatures may occur in the case of a large gradient in the shallow impurity profile at the end of the space charge region. Constant capacitance DLTS is the ideal tool to deal with an inhomogeneous shallow charge distribution, since in this case the trap concentration does not depend on the concentration of the shallow impurities.
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