Influence of air humidity on polymeric microresonators

Abstract

The influence of air humidity on polymeric microresonators is investigated by means of three different resonator types. SU-8 microbeams, SU-8 microstrings and a silicon micromirror with SU-8 hinges are exposed to relative humidities between 3% and 60%. The shifts of the resonant frequencies as a function of the relative humidity (RH) are explained based on mechanical models which are extended with water absorption models in polymer materials. The dominant effect causing the resonant frequency change is evaluated for each structure type. The eigenfrequency of the microstrings and the micromirror in the out-of-plane mode, which both mainly are defined by the pre-stress of the polymeric structures, are found to be highly sensitive to changes of air humidity. The humidity-induced (hygrometric) volume expansion reversibly reduces the pre-stress which results in relative frequency changes of up to 0.78%/%RH for the microstrings. A maximum coefficient of humidity-induced volume expansion for SU-8 of αhyg = 52.3 ppm/%RH is evaluated by fitting the data with the analytical model. It was found that microstrings that were stored at 150 °C over 150 h are more moisture sensitive compared to structures that were stored at room temperature. For the SU-8 microbeams and the micromirror in the tilt mode, the eigenfrequency is mainly defined by the modulus of the polymer material. The measured relative resonant frequency changes were below 1% for the given RH range. For low RH values, antiplasticization is observed (the modulus increases) followed by a plasticization for increasing RH values.