Abstract
The paper presents the results of calculations of the resonant frequency of a multilayer square membrane for ultrasonic microelectromechanical sensors. Various combinations of active layer materials and metal electrodes were taken into account. The dependences of the resonant frequency on the side length of membrane, as well as on the thickness of active piezoelectric layer and metal electrode for SiO2/Ti/ZnO, SiO2/Al/ZnO, SiO2/Ti/PZT and SiO2/Al/PZT structures were ob-tained. According to the calculations, the values of the resonant frequencies are in the ranges of 46.1–498.3 kHz for SiO2/Ti/ZnO; 45.4–477.3 kHz for SiO2/Al/ZnO; 39.4–411.4 kHz for SiO2/Ti/PZT; 38.1–381 kHz for SiO2/Al/PZT. It is shown that the resonant frequency can be increased due to changes in the geometric parameters of the membrane; and the material and dimensions of the piezoelectric layer have the greatest influence. The results of analytical and numerical simulations for particular case of SiO2(1μm)/Ti(1μm)/ZnO(2μm)/Ti(1μm) membrane with a side length of 600 μm are also compared. The obtained results could be used to optimize the design and process technology of microelectrome-chanical ultrasonic sensors.
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