Abstract
Microelectromechanical Resonators The cover art illustrates an aluminum nitride transduced microelectromechanical resonators, as described by David D. Lynes and Hengky Chandrahalim in article number 2202446. By including a tailored oxide thin film in the resonator's body, the quality factor is increased by up to 400% for devices operating at very high frequency and super high frequency bands. The quality factor enhancement persists at operating temperatures as low as −200 °C up to +200 °C.
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