Influence of a cathode surface oxide film on the energy distributions of ions and fast atoms in a glow discharge

Abstract

A model of the cathode sheath of a glow discharge in the presence of a thin dielectric oxide film on the cathode is formulated. It takes into account cathode ion-electron emission and the emission of electrons from the cathode metal substrate under a strong electric field generated in the film by the ion surface charge. The influence of the oxide film on the discharge parameters, the ion and fast atom energy spectra near the cathode surface, and the intensity of its sputtering is estimated.