Abstract
To accurately measure the micro-interactive force (for example, adhesion, surface tension, friction, and assembly force) acting on microdevices during micro/nano manipulation, a novel microforce sensor that can reliably measure force in the range of sub-micro-Newton (μN) is designed and developed in this study. During the application of this microforce sensor in micro/nano manipulation, the accuracy of this sensor's model is quite important to the force control of the system. Therefore, the accurate infinite dimension model of the microforce sensor and micromanipulator is built up. Based on the infinite dimension model, the impedance control system is designed. To verify the infinite dimension model and the control system, micromanipulation experiments are designed and realized. Experiment results verify the accuracy of the infinite dimension model of the sensor and show the efficiency of the impedance control system. The developed microforce sensor and the infinite dimension modeling provide a feasible and versatile solution in microforce sensing and feedback force control for micro/nano manipulation, and will promote the technology of automating the micro/nano manipulation.
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