Abstract
We present a novel nuclear microanalysis technique to profile hydrogen and deuterium in materials; it should be particularly useful in fusion technology. It uses a small 350 keV light-ion accelerator and an E × B filter (crossed electric and magnetic fields) whose optimization is discussed. The charge fraction measurements required are also briefly reported. The depth probed is 1000 Å (H only) or 600 Å (H and D simultaneously), the sensitivity 1 at%, improvable to 0.1%, and the resolution 50–200 Å depending on depth (in Si). Examples of measured H profiles are discussed.
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