Abstract
AbstractPlasma enhanced chemical vapor deposition (PECVD) of a-Si:H with silane or silane and hydrogen at temperatures lower than 200°C commonly results in films with significant dihydride bonding and a high defect density. In this paper, we demonstrate the formation of monohydride dominant a-Si:H films using rf parallel plate PECVD at 35°C at deposition rates greater than 100 Å/min. In the as-deposited state, these films have low dark conductivity (∼10−9 S/cm) and low photoconductivity. Annealing the films at 150°C caused the monohydride dominant films to show photo to dark conductivity ratio near 105. Our results also indicate that an increase in monohydride fraction is not linked with a decrease in deposition rate.
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