Abstract
The inelastic scattering of 120 keV electrons from thin-film targets of carbon, aluminum, vanadium, and silver has been measured at 120° and 135°. The number of inelastically scattered electrons at each angle has been normalized to the elastically scattered electrons and the difference of the spectra at the two angles has been computed to correct for backscattering in the Si detector. The results are compared with a double scattering process of ionization followed by elastic scattering in the target. Significantly more backscattering is observed than can be explained by either the single scattering processes of ionization or bremsstrahlung or by the double process considered. Additional double processes need to be considered to resolve the discrepancy.
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More From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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