Abstract
Surprisingly large difference between inelastic mean-free path (IMFP) values of signal electrons calculated from optical data and from the predictive TPP-2M formulae for diamond or graphite has motivated us to verify both sources of IMFP by measuring these values using different method. Thin, perfectly transparent nanocrystalline diamond films were characterized by x-ray induced photoelectron and Auger electron spectroscopy. Elastic peak electron spectroscopy measurements and the Monte Carlo calculations of electron transport were applied to determine the IMFPs for medium electron energy. The surface energy losses were also considered when evaluating these IMFPs.
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