Abstract
Electron transfer phenomena and inelastic ion-surface collisions lead to various processes of ionization: excitation of projectile/target atoms, secondary electron or atom/ion emission, etc. An important issue is the effect of electron exchange between the outgoing excited/ionized species and in particular, the effect of the chemical environment or surface composition on the outcome of the emission process. Secondary emission of molecular and/or cluster ions in the sputtering process has a large impact on the compositional analysis of materials. The problem arising out of 'matrix effect' in secondary ion mass spectrometry (SIMS) has largely been circumvented by the quantitative potential of the MCs+-SIMS method. However, it generally suffers from a low useful yield of MCs+ ions and in such case, MCs+2 molecular ions offers a better detection sensitivity. The present paper addresses the understanding of MCs+n (n = 1,2...) molecular ions formed in inelastic ion-surface collision processes.
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