Abstract

Effects of high humidity on γ-aminopropyltriethoxysilane adsorbed from vapor on a plasma grown Al 2O 3 surface were studied by measuring inelastic electron tunneling spectra of the sample exposed to 75% relative humidity for various lengths of time. The majority of the initially adsorbed silane is desorbed by the exposure to high humidity and the remaining silane undergoes hydrolysis. Ethanol produced by hydrolysis is probably oxidized to acetaldehyde on the Al 2O 3 surface. Interaction between the vapor deposited silane and the surface OH groups is inferred from the frequency shifts of the stretching mode of the surface OH groups. Reorientation of the adsorbed silane molecules in the tunneling barrier caused by the initial exposure to high humidity is observed.

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