Abstract
The inelastic interaction of electrons with overlayers on substrates is investigated within the framework of dielectric response theory. A general formula for the position-dependent inelastic differential inverse mean free path (DIIMFP), for electron transport in a layered system has been derived. The position dependence reveals specific details of the changes between bulk, interface and surface excitation modes. Numerical calculations of the DIIMFP and the IIMFP have been made for the case of a Au film deposited on a Si substrate, for which experimental optical constants and an extended Drude dielectric function have been used.
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