Abstract
The article presents composition-dependent structural and mechanical properties of sputter-deposited W-B-C coatings. The industrial batch-coater employs a cylindrical sputter source fitted with a segmented target composed of tungsten, boron carbide, and carbon segments. Stationary and single-axis rotation depositions are carried out to understand the differences between laboratory-like and industrial preparation of the coatings. The W-B-C coatings are studied over a broad range of chemical compositions. Coatings are mainly amorphous, but at specific chemical compositions, they tend to form the short-range ordered tungsten borides or nanocrystalline cubic tungsten carbide. The amorphous coatings exhibit high hardness (24 GPa), high elastic modulus (440 GPa), no residual stress, and outperform the TiN and AlCrN in the damage resistance determined by the instrumental indentation test.
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