Abstract
A Lely-type furnace utilizing 10 kHz induction heating has proved to have significant advantages over resistance-heated furnaces for the growth of high quality α-SiC crystals. A massive graphite susceptor, with good thermal isolation from the cooled parts of the furnace, can be used. This design leads to low thermal gradients and freedom from “hot spots” — conditions ideal for reproducible growth of large thin platelets of SiC. Other benefits of the design are long useful heater life (about 240 hr at 2600 °C) and general ease of operation.
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