Abstract

We experimentally measured and compared the sheet inductance of YBa $_{2}$ Cu $_{3}$ O $_{7-\delta }$ (YBCO) films with and without superconducting ground planes. Specifically, we fabricated several superconducting quantum interference devices from single and multilayer films with different geometries using a focused helium ion beam. Measurements of the device electrical transport properties were analyzed to determine the sheet inductance. Additionally, temperature dependent measurements of the inductance were used in order to separate the contributions from geometric and kinetic inductance. We found that the presence of a ground plane in our multilayer structure significantly reduces the contribution of the geometric inductance with no detectable change in the kinetic inductance.

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