Abstract

Gallium oxide nanowires (NWs) were synthetized using a vapor-liquid-solid route via carbothermal reduction. These NWs were characterized using XRD, SEM and TEM as well as photoluminescence spectroscopy, confirming their crystalline nature. Gas sensors, based on individual NWs, deposited on suspended microhotplates, were tested towards several gases of interest at different temperatures. The sensing towards relative humidity provided the best results, with responses up to 20% at room temperature (~25 °C).

Highlights

  • Chemoresistive gas sensors based on metal oxide nanostructures exhibit sensitivities up to parts per billions towards different gases [1]

  • In this work we only focused on the response towards relative humidity and oxygen, because their effect can be clearly monitored at this relatively low temperatures, as Ga2O3 usually is operated at temperatures above of 500 °C [11]

  • The response to relative humidity is considerably high, even at room temperature, with changes up to 20%, with response times below 30 min and recovery times of 1 h, approximately

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Summary

Introduction

Chemoresistive gas sensors based on metal oxide nanostructures exhibit sensitivities up to parts per billions (ppb) towards different gases [1]. The high surface to volume ratio exhibited in nanostructured materials, and especially in the nanowire (NW) morphology, is a very interesting property in the field of gas sensing. The use of NWs instead of thin films as main element of a gas sensor might enhance the sensitivity and selectivity of the final device. The metal oxide studied here is, the monoclinic β-Ga2O3 is a wide band gap material, chemically and thermally stable, well-known for its sensing properties at high temperatures [2,3,4]. This work focuses in the synthesis, physical and optical characterization of β-Ga2O3 NWs followed by the fabrication and characterization of single NW-based gas sensors

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