Abstract
In this paper a 90 kJ plasma focus facility was used to the bombardment of the titanium substrate using nitrogen ion beams. From x-ray diffraction patterns, we investigated the structure properties of titanium nitride layer has been successfully deposited on the titanium substrate such as grain size microstrain and dislocation density. In this work we observed the growth of in grain size with increasing a number of deposition shots. Decrease in dislocation density and microstrain at higher deposition is the another results we observed in this work. The topography and morphology of TiN samples was studied by scanning electron microscopy (SEM) and optical microscopy images. From SEM micrograph, damage of surface and creation of pits and cracks was reported. The goniometric test indicate increasing in contact angle of water drop for irradiated samples in respect to the unirradiated samples. The Knoop microhardness of the samples is increased about 500%. With increasing of nitrogen ion flux, the microhardness increases.
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