Abstract
This paper reports an investigation of microcrystalline diamond (MCD) films deposited under different conditions to increase thermal conductivity and therefore mechanical quality factor (Q) in micromechanical resonators. Through a study of different deposition conditions, we demonstrate a three-fold increase in thermal conductivity and quality factor. Quality factor measurements were conducted on double ended tuning fork resonators, showing Q = 241,047 at fn = 246.86 kHz after annealing, the highest Q reported for polycrystalline diamond resonators. We further present a study of the unique microstructure of hot filament chemical vapor deposition (HFCVD) diamond films and relate growth conditions to observed microstructural defects.
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