Abstract
Density of 3×1011/cm2 and diameter of CNTs of 9–12nm were successfully controlled by using the multi-layered catalyst film consisting of an additional Ni layer on Fe/Al catalyst film. EDS analysis for the annealed catalyst films revealed that the increase of the density of Fe catalyst particles corresponded with the decrease of Ni in the films, which strongly suggested that the additional thin Ni layer on the Fe/Al multi-layered catalyst films prevented the fine Fe catalyst particles from agglomeration, resulting in the growth of high-density, and uniform diameter of CNTs.
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